Defect annealing in ultra-thin polycrystalline silicon films on glass: Rapid thermal versus laser processing

Li, W. / Varlamov, S. / Dore, J. et al. | British Library Online Contents | 2013

Growth and physical properties of in situ phosphorus-doped RTLPCVD polycrystalline silicon thin films

Kallel, S. / Semmache, B. / Lemiti, M. et al. | British Library Online Contents | 1998

Development of a rapid thermal annealing process for polycrystalline silicon thin-film solar cells on glass

Rau, B. / Weber, T. / Gorka, B. et al. | British Library Online Contents | 2009

Rapid thermal annealing of thin doped and undoped spin-on glass films

Ventura, L. / Slaoui, A. / Muller, J. C. et al. | British Library Online Contents | 1995

Effect of Rapid Thermal Annealing Condition on the Structure and Conductivity Properties of Polycrystalline Silicon Films on Glass

Wang, W.Y. / Huang, J.H. / Zhang, X.P. et al. | British Library Online Contents | 2011