Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Femtosecond laser micromilling of Si wafers

    New search for: Lee, S.
    New search for: Yang, D.
    New search for: Nikumb, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Femtosecond laser micromilling of Si wafers

    New search for: Lee, S.
    New search for: Yang, D.
    New search for: Nikumb, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Femtosecond laser micromilling of Si wafers

    New search for: Lee, S.
    New search for: Yang, D.
    New search for: Nikumb, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Femtosecond laser micromilling of Si wafers

    Contributors:

    Lee, S. (author) / Yang, D. (author) / Nikumb, S. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 254 ; 2996-3005

    Publication date:

    2008-01-01

    Size:

    10 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Spheroidal chip in micromilling

    de Oliveira, Déborah / Gomes, Milla Caroline / da Silva, Márcio Bacci | British Library Online Contents | 2019

    Multi-Axis Control Ultraprecision Micromilling

    Takeuchi, Y. | British Library Online Contents | 2010

    Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology

    Oblov, N. Samotaev. K. / Etrekova, M. / Veselov, D. et al. | TIBKAT | 2020

    Pavement Preservation with Micromilling in Georgia: Follow-Up Study

    Lai, J. / Hines, S. / Wu, P.Y. et al. | British Library Online Contents | 2012

    A Micromilling Experimental Study on AISI 4340 Steel

    Wang, J.S. / Zhao, D.J. / Gong, Y.D. | British Library Online Contents | 2009

    Back to top