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    Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology

    New search for: Oblov, N. Samotaev. K.
    New search for: Etrekova, M.
    New search for: Veselov, D.
    New search for: Gorshkova, A.

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    Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology

    New search for: Oblov, N. Samotaev. K.
    New search for: Etrekova, M.
    New search for: Veselov, D.
    New search for: Gorshkova, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology

    New search for: Oblov, N. Samotaev. K.
    New search for: Etrekova, M.
    New search for: Veselov, D.
    New search for: Gorshkova, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology

    Contributors:

    Oblov, N. Samotaev. K. (author) / Etrekova, M. (author) / Veselov, D. (author) / Gorshkova, A. (author)

    Conference:

    International Conference on Metal Material Processes and Manufacturing ; 2. ; 2019 ; Cheju-do

    Published in:

    Metal materials processes and manufacturing

    Publication date:

    2020

    ISBN:

    9783035716320 , 3035716323

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    Materials science , Materials , Metals

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