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    Investigation on the stiffness and linear error of an air slide table of ultra precision machine in nano-machining

    New search for: Vahdati, M.
    New search for: Shokuhfar, A.

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    Investigation on the stiffness and linear error of an air slide table of ultra precision machine in nano-machining

    New search for: Vahdati, M.
    New search for: Shokuhfar, A.

    Access

    Access via TIB
    Check availability in my library
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    Investigation on the stiffness and linear error of an air slide table of ultra precision machine in nano-machining

    New search for: Vahdati, M.
    New search for: Shokuhfar, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Investigation on the stiffness and linear error of an air slide table of ultra precision machine in nano-machining

    Contributors:

    Vahdati, M. (author) / Shokuhfar, A. (author)

    Published in:

    MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK ; 39 ; 162-166

    Publication date:

    2008-01-01

    Size:

    5 pages

    ISSN:

    0933-5137

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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