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Influence of Nano Abrasive on Chemical Mechanical Ultra-Precision Machining of Sapphire Substrate Surfaces
Influence of Nano Abrasive on Chemical Mechanical Ultra-Precision Machining of Sapphire Substrate Surfaces
Influence of Nano Abrasive on Chemical Mechanical Ultra-Precision Machining of Sapphire Substrate Surfaces
Niu, X.H. (author) / Huang, Y.H. (author) / Zhou, J.W. (author) / Han, L.Y. (author) / Yuan, G.H. (author)
KEY ENGINEERING MATERIALS ; 609/610 ; 130-134
2014-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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