Influence of Nano Abrasive on Chemical Mechanical Ultra-Precision Machining of Sapphire Substrate Surfaces: Fid-Bau Portal

Influence of Nano Abrasive on Chemical Mechanical Ultra-Precision Machining of Sapphire Substrate Surfaces

Niu, X.H. / Huang, Y.H. / Zhou, J.W. / Han, L.Y. / Yuan, G.H.

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Influence of Nano Abrasive on Chemical Mechanical Ultra-Precision Machining of Sapphire Substrate Surfaces

Niu, X.H. / Huang, Y.H. / Zhou, J.W. / Han, L.Y. / Yuan, G.H.

Influence of Nano Abrasive on Chemical Mechanical Ultra-Precision Machining of Sapphire Substrate Surfaces

Niu, X.H. / Huang, Y.H. / Zhou, J.W. / Han, L.Y. / Yuan, G.H.

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Check availability in my library

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Document information

Title:

Influence of Nano Abrasive on Chemical Mechanical Ultra-Precision Machining of Sapphire Substrate Surfaces

Contributors:

Niu, X.H. (author) / Huang, Y.H. (author) / Zhou, J.W. (author) / Han, L.Y. (author) / Yuan, G.H. (author)

Published in:

KEY ENGINEERING MATERIALS ; 609/610 ; 130-134

Publication date:

2014-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Yuan, J.L. / Hu, D.X. / Wang, Z.W. et al. | British Library Online Contents | 2008

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