Gas barrier properties of titanium oxynitride films deposited on polyethylene terephthalate substrates by reactive magnetron sputtering: Fid-Bau Portal

Gas barrier properties of titanium oxynitride films deposited on polyethylene terephthalate substrates by reactive magnetron sputtering

Lin, M. C. / Chang, L. S. / Lin, H. C.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Gas barrier properties of titanium oxynitride films deposited on polyethylene terephthalate substrates by reactive magnetron sputtering

Lin, M. C. / Chang, L. S. / Lin, H. C.

Gas barrier properties of titanium oxynitride films deposited on polyethylene terephthalate substrates by reactive magnetron sputtering

Lin, M. C. / Chang, L. S. / Lin, H. C.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Gas barrier properties of titanium oxynitride films deposited on polyethylene terephthalate substrates by reactive magnetron sputtering

Contributors:

Lin, M. C. (author) / Chang, L. S. (author) / Lin, H. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 3509-3516

Publication date:

2008-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Nezar, Sawsen / Saoula, Nadia / Sali, Samira et al. | British Library Online Contents | 2017

Properties of titanium thin films deposited by dc magnetron sputtering

Jeyachandran, Y. L. / Karunagaran, B. / Narayandass, S. K. et al. | British Library Online Contents | 2006

Indium tin oxide films deposited by thermionic-enhanced DC magnetron sputtering on unheated polyethylene terephthalate polymer substrate

Lan, Y. F. / Peng, W. C. / Lo, Y. H. et al. | British Library Online Contents | 2009

Characterisation of aluminium oxide thin films deposited on polycarbonate substrates by reactive magnetron sputtering

Koski, K. / Holsa, J. / Juliet, P. et al. | British Library Online Contents | 1999

AlNxOy thin films deposited by DC reactive magnetron sputtering

Borges, J. / Vaz, F. / Marques, L. | British Library Online Contents | 2010