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    Nitric acid method for fabrication of gate oxides in TFT

    New search for: Mizushima, S.
    New search for: Imai, S.
    New search for: Tanaka, M.
    New search for: Kobayashi, H.

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    Nitric acid method for fabrication of gate oxides in TFT

    New search for: Mizushima, S.
    New search for: Imai, S.
    New search for: Tanaka, M.
    New search for: Kobayashi, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Nitric acid method for fabrication of gate oxides in TFT

    New search for: Mizushima, S.
    New search for: Imai, S.
    New search for: Tanaka, M.
    New search for: Kobayashi, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Nitric acid method for fabrication of gate oxides in TFT

    Contributors:

    Mizushima, S. (author) / Imai, S. (author) / Tanaka, M. (author) / Kobayashi, H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 254 ; 3685-3689

    Publication date:

    2008-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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