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Fabrication of Thick Silicon Nitride Substrates by Tape Casting
Fabrication of Thick Silicon Nitride Substrates by Tape Casting
Fabrication of Thick Silicon Nitride Substrates by Tape Casting
Ma, S.H. (author) / Ning, X.S. (author) / Fu, T. (author) / Zhou, H.P. (author) / Chen, K.X. (author) / Pan, W. / Gong, J.
2008-01-01
3 pages
Article (Journal)
English
DDC:
620.11
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