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Fabrication and analysis of ZnO thin film bulk acoustic resonators

Lin, Y. C. / Hong, C. R. / Chuang, H. A.

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Fabrication and analysis of ZnO thin film bulk acoustic resonators

Lin, Y. C. / Hong, C. R. / Chuang, H. A.

Fabrication and analysis of ZnO thin film bulk acoustic resonators

Lin, Y. C. / Hong, C. R. / Chuang, H. A.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication and analysis of ZnO thin film bulk acoustic resonators

Contributors:

Lin, Y. C. (author) / Hong, C. R. (author) / Chuang, H. A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 3780-3786

Publication date:

2008-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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