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Influence of un-cured PDMS chains in stamp using PDMS-based lithography
Influence of un-cured PDMS chains in stamp using PDMS-based lithography
Influence of un-cured PDMS chains in stamp using PDMS-based lithography
Kim, J. (author) / Park, M. (author) / Chae, G. S. (author) / Chung, I. J. (author)
APPLIED SURFACE SCIENCE ; 254 ; 5266-5270
2008-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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