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    Calculation on Temperature Rise of CMP Process: Roughness Effects Considered

    New search for: Ye, W.
    New search for: Zhang, C.H.
    New search for: Niu, J.
    New search for: Liu, Z.
    New search for: Jin, C.
    New search for: Zhov, G.

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    Calculation on Temperature Rise of CMP Process: Roughness Effects Considered

    New search for: Ye, W.
    New search for: Zhang, C.H.
    New search for: Niu, J.
    New search for: Liu, Z.
    New search for: Jin, C.
    New search for: Zhov, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Calculation on Temperature Rise of CMP Process: Roughness Effects Considered

    New search for: Ye, W.
    New search for: Zhang, C.H.
    New search for: Niu, J.
    New search for: Liu, Z.
    New search for: Jin, C.
    New search for: Zhov, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Calculation on Temperature Rise of CMP Process: Roughness Effects Considered

    Contributors:

    Ye, W. (author) / Zhang, C.H. (author) / Niu, J. / Liu, Z. / Jin, C. / Zhov, G.

    Published in:

    Physical and Numerical Simulation of Materials Processing ; 1348-1353

    MATERIALS SCIENCE FORUM ; 575/578

    Publication date:

    2008-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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