Self-Sealing of Nanoporous Low Dielectric Constant Patterns Fabricated by Nanoimprint Lithography: Fid-Bau Portal

Self-Sealing of Nanoporous Low Dielectric Constant Patterns Fabricated by Nanoimprint Lithography

Ro, H. W. / Peng, H. / Niihara, K. i. / Lee, H. J. / Lin, E. K. / Karim, A. / Gidley, D. W. / Jinnai, H. / Yoon, D. Y. / Soles, C. L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Self-Sealing of Nanoporous Low Dielectric Constant Patterns Fabricated by Nanoimprint Lithography

Ro, H. W. / Peng, H. / Niihara, K. i. / Lee, H. J. / Lin, E. K. / Karim, A. / Gidley, D. W. / Jinnai, H. / Yoon, D. Y. / Soles, C. L.

Self-Sealing of Nanoporous Low Dielectric Constant Patterns Fabricated by Nanoimprint Lithography

Ro, H. W. / Peng, H. / Niihara, K. i. / Lee, H. J. / Lin, E. K. / Karim, A. / Gidley, D. W. / Jinnai, H. / Yoon, D. Y. / Soles, C. L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Self-Sealing of Nanoporous Low Dielectric Constant Patterns Fabricated by Nanoimprint Lithography

Contributors:

Ro, H. W. (author) / Peng, H. (author) / Niihara, K. i. (author) / Lee, H. J. (author) / Lin, E. K. (author) / Karim, A. (author) / Gidley, D. W. (author) / Jinnai, H. (author) / Yoon, D. Y. (author) / Soles, C. L. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 20 ; 1934-1939

Publication date:

2008-01-01

Size:

6 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Ro, H. W. / Jones, R. L. / Peng, H. et al. | British Library Online Contents | 2007

Nanoimprint Lithography for Functional Three-Dimensional Patterns

Ofir, Y. / Moran, I. W. / Subramani, C. et al. | British Library Online Contents | 2010

Nanoimprint Lithography and Lithographically Induced Self-Assembly

Chou, S. Y. | British Library Online Contents | 2001

Tribology issues in nanoimprint lithography

Kim, K. S. / Kim, J. H. / Lee, H. J. et al. | British Library Online Contents | 2010

High-Resolution Contact Printing with Chemically Patterned Flat Stamps Fabricated by Nanoimprint Lithography

Duan, X. / Zhao, Y. / Perl, A. et al. | British Library Online Contents | 2009