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Tribology issues in nanoimprint lithography

Kim, K. S. / Kim, J. H. / Lee, H. J. / Lee, S. R.

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Tribology issues in nanoimprint lithography

Kim, K. S. / Kim, J. H. / Lee, H. J. / Lee, S. R.

Tribology issues in nanoimprint lithography

Kim, K. S. / Kim, J. H. / Lee, H. J. / Lee, S. R.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Tribology issues in nanoimprint lithography

Contributors:

Kim, K. S. (author) / Kim, J. H. (author) / Lee, H. J. (author) / Lee, S. R. (author)

Published in:

JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 24 ; 5-12

Publication date:

2010-01-01

Size:

8 pages

ISSN:

1738-494X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621

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