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    Nanomechanical Properties and Nanostructure of CMG and CMP Machined Si Substrates

    New search for: Wang, B.L.
    New search for: Huang, H.
    New search for: Zou, J.
    New search for: Zhou, L.
    New search for: Gao, W.
    New search for: Takaya, Y.
    New search for: Gao, Y.
    New search for: Krystek, M.

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    Nanomechanical Properties and Nanostructure of CMG and CMP Machined Si Substrates

    New search for: Wang, B.L.
    New search for: Huang, H.
    New search for: Zou, J.
    New search for: Zhou, L.
    New search for: Gao, W.
    New search for: Takaya, Y.
    New search for: Gao, Y.
    New search for: Krystek, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Nanomechanical Properties and Nanostructure of CMG and CMP Machined Si Substrates

    New search for: Wang, B.L.
    New search for: Huang, H.
    New search for: Zou, J.
    New search for: Zhou, L.
    New search for: Gao, W.
    New search for: Takaya, Y.
    New search for: Gao, Y.
    New search for: Krystek, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Nanomechanical Properties and Nanostructure of CMG and CMP Machined Si Substrates

    Contributors:

    Wang, B.L. (author) / Huang, H. (author) / Zou, J. (author) / Zhou, L. (author) / Gao, W. / Takaya, Y. / Gao, Y. / Krystek, M.

    Published in:

    Measurement Technology and Intelligent Instruments VIII ; 525-528

    KEY ENGINEERING MATERIALS ; 381/382

    Publication date:

    2008-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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