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    Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates

    New search for: Huang, X. M. H.
    New search for: Feng, X. L.
    New search for: Prakash, M. K.
    New search for: Kumar, S.
    New search for: Zorman, C. A.
    New search for: Mehregany, M.
    New search for: Roukes, M. L.

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    Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates

    New search for: Huang, X. M. H.
    New search for: Feng, X. L.
    New search for: Prakash, M. K.
    New search for: Kumar, S.
    New search for: Zorman, C. A.
    New search for: Mehregany, M.
    New search for: Roukes, M. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates

    New search for: Huang, X. M. H.
    New search for: Feng, X. L.
    New search for: Prakash, M. K.
    New search for: Kumar, S.
    New search for: Zorman, C. A.
    New search for: Mehregany, M.
    New search for: Roukes, M. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates

    Contributors:

    Huang, X. M. H. (author) / Feng, X. L. (author) / Prakash, M. K. (author) / Kumar, S. (author) / Zorman, C. A. (author) / Mehregany, M. (author) / Roukes, M. L. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 457/460 ; 1531-1536

    Publication date:

    2004-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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