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    Traceable Dimension Metrology by AFM for Nanoscale Process Control

    New search for: Bao, T.
    New search for: Gao, W.
    New search for: Takaya, Y.
    New search for: Gao, Y.
    New search for: Krystek, M.

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    Traceable Dimension Metrology by AFM for Nanoscale Process Control

    New search for: Bao, T.
    New search for: Gao, W.
    New search for: Takaya, Y.
    New search for: Gao, Y.
    New search for: Krystek, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Traceable Dimension Metrology by AFM for Nanoscale Process Control

    New search for: Bao, T.
    New search for: Gao, W.
    New search for: Takaya, Y.
    New search for: Gao, Y.
    New search for: Krystek, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Traceable Dimension Metrology by AFM for Nanoscale Process Control

    Contributors:

    Bao, T. (author) / Gao, W. / Takaya, Y. / Gao, Y. / Krystek, M.

    Published in:

    Measurement Technology and Intelligent Instruments VIII ; 549-552

    KEY ENGINEERING MATERIALS ; 381/382

    Publication date:

    2008-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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