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Traceable pico-meter level step height metrology
Traceable pico-meter level step height metrology
Traceable pico-meter level step height metrology
Orji, N. G. (author) / Dixson, R. G. (author) / Fu, J. (author) / Vorburger, T. V. (author)
WEAR -LAUSANNE- ; 257 ; 1264-1269
2004-01-01
6 pages
Article (Journal)
English
DDC:
620.11292
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