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Traceable pico-meter level step height metrology

Orji, N. G. / Dixson, R. G. / Fu, J. / Vorburger, T. V.

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Traceable pico-meter level step height metrology

Orji, N. G. / Dixson, R. G. / Fu, J. / Vorburger, T. V.

Traceable pico-meter level step height metrology

Orji, N. G. / Dixson, R. G. / Fu, J. / Vorburger, T. V.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Traceable pico-meter level step height metrology

Contributors:

Orji, N. G. (author) / Dixson, R. G. (author) / Fu, J. (author) / Vorburger, T. V. (author)

Published in:

WEAR -LAUSANNE- ; 257 ; 1264-1269

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0043-1648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11292

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