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    Annealing effects on the optical and structural properties of Al2O3/SiO2 films as UV antireflection coatings on 4H-SiC substrates

    New search for: Zhang, F.
    New search for: Yang, W.
    New search for: Pang, A.
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    New search for: Qi, H.
    New search for: Yao, J.
    New search for: Fan, Z.
    New search for: Shao, J.

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    Annealing effects on the optical and structural properties of Al2O3/SiO2 films as UV antireflection coatings on 4H-SiC substrates

    New search for: Zhang, F.
    New search for: Yang, W.
    New search for: Pang, A.
    New search for: Wu, Z.
    New search for: Qi, H.
    New search for: Yao, J.
    New search for: Fan, Z.
    New search for: Shao, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Annealing effects on the optical and structural properties of Al2O3/SiO2 films as UV antireflection coatings on 4H-SiC substrates

    New search for: Zhang, F.
    New search for: Yang, W.
    New search for: Pang, A.
    New search for: Wu, Z.
    New search for: Qi, H.
    New search for: Yao, J.
    New search for: Fan, Z.
    New search for: Shao, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Annealing effects on the optical and structural properties of Al2O3/SiO2 films as UV antireflection coatings on 4H-SiC substrates

    Contributors:

    Zhang, F. (author) / Yang, W. (author) / Pang, A. (author) / Wu, Z. (author) / Qi, H. (author) / Yao, J. (author) / Fan, Z. (author) / Shao, J. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 254 ; 6410-6415

    Publication date:

    2008-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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