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Wet chemical etching method for BST thin films annealed at high temperature

Zhang, R. T. / Yang, C. R. / Yu, A. / Wang, B. / Tang, H. J. / Chen, H. W. / Zhang, J. H.

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Wet chemical etching method for BST thin films annealed at high temperature

Zhang, R. T. / Yang, C. R. / Yu, A. / Wang, B. / Tang, H. J. / Chen, H. W. / Zhang, J. H.

Wet chemical etching method for BST thin films annealed at high temperature

Zhang, R. T. / Yang, C. R. / Yu, A. / Wang, B. / Tang, H. J. / Chen, H. W. / Zhang, J. H.

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Document information

Title:

Wet chemical etching method for BST thin films annealed at high temperature

Contributors:

Zhang, R. T. (author) / Yang, C. R. (author) / Yu, A. (author) / Wang, B. (author) / Tang, H. J. (author) / Chen, H. W. (author) / Zhang, J. H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 6697-6700

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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