Enhanced transmittance of sapphire by silicon oxynitride thin films annealed at high temperatures

Loka, Chadrasekhar / Lee, Kwang / Moon, Sung Whan et al. | British Library Online Contents | 2018

Photoluminescence Characteristics of Silicon Oxynitride Films at Different Annealing Temperatures

Song, J. / Guo, Y.Q. / Wang, X. et al. | British Library Online Contents | 2011

Silicon nanoparticles in thermally annealed thin silicon monoxide films

Szekeres, A. / Nikolova, T. / Paneva, A. et al. | British Library Online Contents | 2005

Plasma enhanced growth, composition and refractive index of silicon oxynitride films

Bose, M. / Bose, D. N. / Basa, D. K. | British Library Online Contents | 2002

Enhanced tunability of the composition in silicon oxynitride thin films by the reactive gas pulsing process

Aubry, E. / Weber, S. / Billard, A. et al. | British Library Online Contents | 2014