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A study on electrical and mechanical properties of hybrid-polymer thin films by a controlled TEOS bubbling ratio

Cho, S. J. / Bae, I. S. / Jeong, H. D. / Boo, J. H.

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A study on electrical and mechanical properties of hybrid-polymer thin films by a controlled TEOS bubbling ratio

Cho, S. J. / Bae, I. S. / Jeong, H. D. / Boo, J. H.

A study on electrical and mechanical properties of hybrid-polymer thin films by a controlled TEOS bubbling ratio

Cho, S. J. / Bae, I. S. / Jeong, H. D. / Boo, J. H.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A study on electrical and mechanical properties of hybrid-polymer thin films by a controlled TEOS bubbling ratio

Contributors:

Cho, S. J. (author) / Bae, I. S. (author) / Jeong, H. D. (author) / Boo, J. H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 7817-7820

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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