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    Organic and organic–inorganic hybrid polymer thin films deposited by PECVD using TEOS and cyclohexene for ULSI interlayer-dielectric application

    New search for: Seo, H. J.
    New search for: Nam, S. H.
    New search for: Kim, S.
    New search for: Boo, J. H.

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    Organic and organic–inorganic hybrid polymer thin films deposited by PECVD using TEOS and cyclohexene for ULSI interlayer-dielectric application

    New search for: Seo, H. J.
    New search for: Nam, S. H.
    New search for: Kim, S.
    New search for: Boo, J. H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Organic and organic–inorganic hybrid polymer thin films deposited by PECVD using TEOS and cyclohexene for ULSI interlayer-dielectric application

    New search for: Seo, H. J.
    New search for: Nam, S. H.
    New search for: Kim, S.
    New search for: Boo, J. H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Organic and organic–inorganic hybrid polymer thin films deposited by PECVD using TEOS and cyclohexene for ULSI interlayer-dielectric application

    Contributors:

    Seo, H. J. (author) / Nam, S. H. (author) / Kim, S. (author) / Boo, J. H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 354 ; 134-138

    Publication date:

    2015-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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