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Effect of H2 and O2 plasma etching treatment on the surface of diamond-like carbon thin film
Effect of H2 and O2 plasma etching treatment on the surface of diamond-like carbon thin film
Effect of H2 and O2 plasma etching treatment on the surface of diamond-like carbon thin film
Yun, D. Y. (author) / Choi, W. S. (author) / Park, Y. S. (author) / Hong, B. (author)
APPLIED SURFACE SCIENCE ; 254 ; 7925-7928
2008-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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