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Effect of H2 and O2 plasma etching treatment on the surface of diamond-like carbon thin film
Effect of H2 and O2 plasma etching treatment on the surface of diamond-like carbon thin film
Effect of H2 and O2 plasma etching treatment on the surface of diamond-like carbon thin film
Yun, D. Y. (Autor:in) / Choi, W. S. (Autor:in) / Park, Y. S. (Autor:in) / Hong, B. (Autor:in)
APPLIED SURFACE SCIENCE ; 254 ; 7925-7928
01.01.2008
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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