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Thermal Decomposition of Parylene C Film

Cao, Q.-h. / Xu, R.-j. / Wang, J.-h.

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Thermal Decomposition of Parylene C Film

Cao, Q.-h. / Xu, R.-j. / Wang, J.-h.

Thermal Decomposition of Parylene C Film

Cao, Q.-h. / Xu, R.-j. / Wang, J.-h.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Thermal Decomposition of Parylene C Film

Contributors:

Cao, Q.-h. (author) / Xu, R.-j. (author) / Wang, J.-h. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 26 ; 620-623

Publication date:

2008-01-01

Size:

4 pages

ISSN:

1673-2812

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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