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    Thermal Imprint Process of Parylene for MEMS Applications

    New search for: Youn, S. W.
    New search for: Goto, H.
    New search for: Takahashi, M.
    New search for: Ogiwara, M.
    New search for: Maeda, R.

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    Thermal Imprint Process of Parylene for MEMS Applications

    New search for: Youn, S. W.
    New search for: Goto, H.
    New search for: Takahashi, M.
    New search for: Ogiwara, M.
    New search for: Maeda, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Thermal Imprint Process of Parylene for MEMS Applications

    New search for: Youn, S. W.
    New search for: Goto, H.
    New search for: Takahashi, M.
    New search for: Ogiwara, M.
    New search for: Maeda, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Thermal Imprint Process of Parylene for MEMS Applications

    Contributors:

    Youn, S. W. (author) / Goto, H. (author) / Takahashi, M. (author) / Ogiwara, M. (author) / Maeda, R. (author)

    Published in:

    KEY ENGINEERING MATERIALS ; 340/341 ; 931-936

    Publication date:

    2007-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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