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    Influence of ejection angle on residual stress and optical properties of sputtering Ta2O5 thin films

    New search for: Tien, C. L.

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    Influence of ejection angle on residual stress and optical properties of sputtering Ta2O5 thin films

    New search for: Tien, C. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of ejection angle on residual stress and optical properties of sputtering Ta2O5 thin films

    New search for: Tien, C. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Influence of ejection angle on residual stress and optical properties of sputtering Ta2O5 thin films

    Contributors:

    Tien, C. L. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 255 ; 2890-2895

    Publication date:

    2008-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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