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Novel ceria-polymer microcomposites for chemical mechanical polishing

Coutinho, C. A. / Mudhivarthi, S. R. / Kumar, A. / Gupta, V. K.

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Novel ceria-polymer microcomposites for chemical mechanical polishing

Coutinho, C. A. / Mudhivarthi, S. R. / Kumar, A. / Gupta, V. K.

Novel ceria-polymer microcomposites for chemical mechanical polishing

Coutinho, C. A. / Mudhivarthi, S. R. / Kumar, A. / Gupta, V. K.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Novel ceria-polymer microcomposites for chemical mechanical polishing

Contributors:

Coutinho, C. A. (author) / Mudhivarthi, S. R. (author) / Kumar, A. (author) / Gupta, V. K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 3090-3096

Publication date:

2008-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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