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    Advanced activation trends for boron and arsenic by combinations of single, multiple flash anneals and spike rapid thermal annealing

    New search for: Lerch, W.
    New search for: Paul, S.
    New search for: Niess, J.
    New search for: McCoy, S.
    New search for: Gelpey, J.
    New search for: Cristiano, F.
    New search for: Severac, F.
    New search for: Fazzini, P.
    New search for: Martinez-Limia, A.
    New search for: Pichler, P.

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    Advanced activation trends for boron and arsenic by combinations of single, multiple flash anneals and spike rapid thermal annealing

    New search for: Lerch, W.
    New search for: Paul, S.
    New search for: Niess, J.
    New search for: McCoy, S.
    New search for: Gelpey, J.
    New search for: Cristiano, F.
    New search for: Severac, F.
    New search for: Fazzini, P.
    New search for: Martinez-Limia, A.
    New search for: Pichler, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Advanced activation trends for boron and arsenic by combinations of single, multiple flash anneals and spike rapid thermal annealing

    New search for: Lerch, W.
    New search for: Paul, S.
    New search for: Niess, J.
    New search for: McCoy, S.
    New search for: Gelpey, J.
    New search for: Cristiano, F.
    New search for: Severac, F.
    New search for: Fazzini, P.
    New search for: Martinez-Limia, A.
    New search for: Pichler, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    Advanced activation trends for boron and arsenic by combinations of single, multiple flash anneals and spike rapid thermal annealing

    Contributors:

    Lerch, W. (author) / Paul, S. (author) / Niess, J. (author) / McCoy, S. (author) / Gelpey, J. (author) / Cristiano, F. (author) / Severac, F. (author) / Fazzini, P. (author) / Martinez-Limia, A. (author) / Pichler, P. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 154-155 ; 3-13

    Publication date:

    2008-01-01

    Size:

    11 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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