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Self-aligned nickel-platinum silicide oxidation
Self-aligned nickel-platinum silicide oxidation
Self-aligned nickel-platinum silicide oxidation
Imbert, B. (author) / Zoll, S. (author) / Garnier, P. (author) / Pernet, B. (author) / Galpin, D. (author) / Beneyton, R. (author) / Juhel, M. (author) / Mur, P. (author) / Carron, V. (author) / Thomas, O. (author)
MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 154-155 ; 155-158
2008-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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