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Optimizing the formation of nickel silicide

Foggiato, J. / Yoo, W. S. / Ouaknine, M. / Murakami, T. / Fukada, T.

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Optimizing the formation of nickel silicide

Foggiato, J. / Yoo, W. S. / Ouaknine, M. / Murakami, T. / Fukada, T.

Optimizing the formation of nickel silicide

Foggiato, J. / Yoo, W. S. / Ouaknine, M. / Murakami, T. / Fukada, T.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Optimizing the formation of nickel silicide

Contributors:

Foggiato, J. (author) / Yoo, W. S. (author) / Ouaknine, M. (author) / Murakami, T. (author) / Fukada, T. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 56-60

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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