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Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools

Ohta, T. / Yan, J.W. / Kodera, S. / Yajima, S. / Horikawa, N. / Takahashi, Y. / Kuriyagawa, T.

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Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools

Ohta, T. / Yan, J.W. / Kodera, S. / Yajima, S. / Horikawa, N. / Takahashi, Y. / Kuriyagawa, T.

Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools

Ohta, T. / Yan, J.W. / Kodera, S. / Yajima, S. / Horikawa, N. / Takahashi, Y. / Kuriyagawa, T.

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Document information

Title:

Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools

Contributors:

Ohta, T. (author) / Yan, J.W. (author) / Kodera, S. (author) / Yajima, S. (author) / Horikawa, N. (author) / Takahashi, Y. (author) / Kuriyagawa, T. (author)

Published in:

KEY ENGINEERING MATERIALS ; 389/390 ; 144-150

Publication date:

2009-01-01

Size:

7 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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