Graphitization Wear of Diamond Tool in Nanometric Cutting of Single Crystal Silicon: Fid-Bau Portal

Graphitization Wear of Diamond Tool in Nanometric Cutting of Single Crystal Silicon

Wang, J.C. / Xin, M.M. / Cao, S.Y. / Zhao, T.

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Graphitization Wear of Diamond Tool in Nanometric Cutting of Single Crystal Silicon

Wang, J.C. / Xin, M.M. / Cao, S.Y. / Zhao, T.

Graphitization Wear of Diamond Tool in Nanometric Cutting of Single Crystal Silicon

Wang, J.C. / Xin, M.M. / Cao, S.Y. / Zhao, T.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Graphitization Wear of Diamond Tool in Nanometric Cutting of Single Crystal Silicon

Contributors:

Wang, J.C. (author) / Xin, M.M. (author) / Cao, S.Y. (author) / Zhao, T. (author)

Published in:

KEY ENGINEERING MATERIALS ; 609/610 ; 751-757

Publication date:

2014-01-01

Size:

7 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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