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    Quartz Wafer Machining Using MCF (Magnetic Compound Fluid) Polishing Liquid Frozen with Liquid Nitrogen

    New search for: Wu, Y.B.
    New search for: Shimada, K.

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    Quartz Wafer Machining Using MCF (Magnetic Compound Fluid) Polishing Liquid Frozen with Liquid Nitrogen

    New search for: Wu, Y.B.
    New search for: Shimada, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Quartz Wafer Machining Using MCF (Magnetic Compound Fluid) Polishing Liquid Frozen with Liquid Nitrogen

    New search for: Wu, Y.B.
    New search for: Shimada, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Quartz Wafer Machining Using MCF (Magnetic Compound Fluid) Polishing Liquid Frozen with Liquid Nitrogen

    Contributors:

    Wu, Y.B. (author) / Shimada, K. (author)

    Published in:

    KEY ENGINEERING MATERIALS ; 389/390 ; 187-192

    Publication date:

    2009-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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