Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering: Fid-Bau Portal

Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering

Yang, T. / Zhang, Z. / Li, Y. / Lv, M. / Song, S. / Wu, Z. / Yan, J. / Han, S.

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Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering

Yang, T. / Zhang, Z. / Li, Y. / Lv, M. / Song, S. / Wu, Z. / Yan, J. / Han, S.

Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering

Yang, T. / Zhang, Z. / Li, Y. / Lv, M. / Song, S. / Wu, Z. / Yan, J. / Han, S.

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Check availability in my library

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Document information

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Document information

Title:

Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering

Contributors:

Yang, T. (author) / Zhang, Z. (author) / Li, Y. (author) / Lv, M. (author) / Song, S. (author) / Wu, Z. (author) / Yan, J. (author) / Han, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 3544-3547

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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