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    Influence of oxygen plasma treatment on boron carbon nitride film composition

    New search for: Aoki, H.
    New search for: Masuzumi, T.
    New search for: Watanabe, D.
    New search for: Mazumder, M. K.
    New search for: Sota, H.
    New search for: Kimura, C.
    New search for: Sugino, T.

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    Influence of oxygen plasma treatment on boron carbon nitride film composition

    New search for: Aoki, H.
    New search for: Masuzumi, T.
    New search for: Watanabe, D.
    New search for: Mazumder, M. K.
    New search for: Sota, H.
    New search for: Kimura, C.
    New search for: Sugino, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of oxygen plasma treatment on boron carbon nitride film composition

    New search for: Aoki, H.
    New search for: Masuzumi, T.
    New search for: Watanabe, D.
    New search for: Mazumder, M. K.
    New search for: Sota, H.
    New search for: Kimura, C.
    New search for: Sugino, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Influence of oxygen plasma treatment on boron carbon nitride film composition

    Contributors:

    Aoki, H. (author) / Masuzumi, T. (author) / Watanabe, D. (author) / Mazumder, M. K. (author) / Sota, H. (author) / Kimura, C. (author) / Sugino, T. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 255 ; 3635-3638

    Publication date:

    2009-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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