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Influence of Cu electroplating solutions on boron carbon nitride (BCN) film
Influence of Cu electroplating solutions on boron carbon nitride (BCN) film
Influence of Cu electroplating solutions on boron carbon nitride (BCN) film
Aoki, H. (author) / Hara, M. (author) / Masuzumi, T. (author) / Mazumder, M. K. (author) / Ooi, N. (author) / Watanabe, D. (author) / Kimura, C. (author) / Sugino, T. (author)
APPLIED SURFACE SCIENCE ; 255 ; 3719-3722
2009-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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