On the use of a O2:SF6 plasma treatment on GaAs processed surfaces for molecular beam epitaxial regrowth: Fid-Bau Portal

On the use of a O2:SF6 plasma treatment on GaAs processed surfaces for molecular beam epitaxial regrowth

Desplats, O. / Gallo, P. / Doucet, J. B. / Monier, G. / Bideux, L. / Jalabert, L. / Arnoult, A. / Lacoste, G. / Armand, C. / Voillot, F.

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On the use of a O2:SF6 plasma treatment on GaAs processed surfaces for molecular beam epitaxial regrowth

Desplats, O. / Gallo, P. / Doucet, J. B. / Monier, G. / Bideux, L. / Jalabert, L. / Arnoult, A. / Lacoste, G. / Armand, C. / Voillot, F.

On the use of a O2:SF6 plasma treatment on GaAs processed surfaces for molecular beam epitaxial regrowth

Desplats, O. / Gallo, P. / Doucet, J. B. / Monier, G. / Bideux, L. / Jalabert, L. / Arnoult, A. / Lacoste, G. / Armand, C. / Voillot, F.

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Document information

Title:

On the use of a O2:SF6 plasma treatment on GaAs processed surfaces for molecular beam epitaxial regrowth

Contributors:

Desplats, O. (author) / Gallo, P. (author) / Doucet, J. B. (author) / Monier, G. (author) / Bideux, L. (author) / Jalabert, L. (author) / Arnoult, A. (author) / Lacoste, G. (author) / Armand, C. (author) / Voillot, F. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 3897-3901

Publication date:

2009-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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