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Structure and Lattice Location of Ge Implanted 4H-SiC

Kups, T. / Tonisch, K. / Voelskow, M. / Skorupa, W. / Konkin, A. / Pezoldt, J.

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Structure and Lattice Location of Ge Implanted 4H-SiC

Kups, T. / Tonisch, K. / Voelskow, M. / Skorupa, W. / Konkin, A. / Pezoldt, J.

Structure and Lattice Location of Ge Implanted 4H-SiC

Kups, T. / Tonisch, K. / Voelskow, M. / Skorupa, W. / Konkin, A. / Pezoldt, J.

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Check availability in my library

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Document information

Title:

Structure and Lattice Location of Ge Implanted 4H-SiC

Contributors:

Kups, T. (author) / Tonisch, K. (author) / Voelskow, M. (author) / Skorupa, W. (author) / Konkin, A. (author) / Pezoldt, J. (author)

Published in:

MATERIALS SCIENCE FORUM ; 600/603 ; 623-626

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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