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The Impact of Chemical-Mechanical Polishing on Defective 4H-SiC Schottky Barrier Diodes
The Impact of Chemical-Mechanical Polishing on Defective 4H-SiC Schottky Barrier Diodes
The Impact of Chemical-Mechanical Polishing on Defective 4H-SiC Schottky Barrier Diodes
Lee, K.Y. (author) / Chen, W.Z. (author) / Capano, M.A. (author)
MATERIALS SCIENCE FORUM ; 600/603 ; 827-830
2009-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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