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    Investigation of Defect Formation in 4H-SiC(0001) and (000-1) Epitaxy

    New search for: Tsuchida, H.
    New search for: Kamata, I.
    New search for: Nagano, M.

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    Investigation of Defect Formation in 4H-SiC(0001) and (000-1) Epitaxy

    New search for: Tsuchida, H.
    New search for: Kamata, I.
    New search for: Nagano, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Investigation of Defect Formation in 4H-SiC(0001) and (000-1) Epitaxy

    New search for: Tsuchida, H.
    New search for: Kamata, I.
    New search for: Nagano, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Investigation of Defect Formation in 4H-SiC(0001) and (000-1) Epitaxy

    Contributors:

    Tsuchida, H. (author) / Kamata, I. (author) / Nagano, M. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 600/603 ; 267-272

    Publication date:

    2009-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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