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    Performance Analysis on Capacitance Micromechanical Comb-Finger Accelerometer

    New search for: Hu, X.M.
    New search for: Han, Q.L.
    New search for: Wang, G.
    New search for: Wang, H.
    New search for: Liu, J.

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    Performance Analysis on Capacitance Micromechanical Comb-Finger Accelerometer

    New search for: Hu, X.M.
    New search for: Han, Q.L.
    New search for: Wang, G.
    New search for: Wang, H.
    New search for: Liu, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Performance Analysis on Capacitance Micromechanical Comb-Finger Accelerometer

    New search for: Hu, X.M.
    New search for: Han, Q.L.
    New search for: Wang, G.
    New search for: Wang, H.
    New search for: Liu, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Performance Analysis on Capacitance Micromechanical Comb-Finger Accelerometer

    Contributors:

    Hu, X.M. (author) / Han, Q.L. (author) / Wang, G. / Wang, H. / Liu, J.

    Published in:

    Manufacturing Automation Technology Selected Papers from Proceeding of the 13th Conference of China University Society on Manufacturing Automation July 22-24, 2008, Harbin, China ; 585-589

    KEY ENGINEERING MATERIALS ; 392/394

    Publication date:

    2009-01-01

    Size:

    5 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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