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Improved Operation of Micromechanical Comb-Drive Actuators through the Use of a New Angled Comb Finger Design
Improved Operation of Micromechanical Comb-Drive Actuators through the Use of a New Angled Comb Finger Design
Improved Operation of Micromechanical Comb-Drive Actuators through the Use of a New Angled Comb Finger Design
Rosa, M. A. (author) / Dimitrijev, S. (author) / Harrison, H. B. (author)
JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES ; 9 ; 283-290
1998-01-01
8 pages
Article (Journal)
English
DDC:
620.11
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