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Optical and electrical properties of indium tin oxide thin films sputter-deposited in working gas containing hydrogen without heat treatments
Optical and electrical properties of indium tin oxide thin films sputter-deposited in working gas containing hydrogen without heat treatments
Optical and electrical properties of indium tin oxide thin films sputter-deposited in working gas containing hydrogen without heat treatments
Luo, S. (author) / Okada, K. (author) / Kohiki, S. (author) / Tsutsui, F. (author) / Shimooka, H. (author) / Shoji, F. (author)
MATERIALS LETTERS ; 63 ; 641-643
2009-01-01
3 pages
Article (Journal)
English
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