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Investigation of thin TiO2 films cosputtered with Si species

Hsu, J. C. / Lee, C. C. / Chen, H. L. / Kuo, C. C. / Wang, P. W.

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Investigation of thin TiO2 films cosputtered with Si species

Hsu, J. C. / Lee, C. C. / Chen, H. L. / Kuo, C. C. / Wang, P. W.

Investigation of thin TiO2 films cosputtered with Si species

Hsu, J. C. / Lee, C. C. / Chen, H. L. / Kuo, C. C. / Wang, P. W.

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Document information

Title:

Investigation of thin TiO2 films cosputtered with Si species

Contributors:

Hsu, J. C. (author) / Lee, C. C. (author) / Chen, H. L. (author) / Kuo, C. C. (author) / Wang, P. W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 4852-4858

Publication date:

2009-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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