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Composition influence of SiNx gate insulator fabricated by radio frequency (RF) Magnetron sputtering on characteristics of organic thin-film transistors
Composition influence of SiNx gate insulator fabricated by radio frequency (RF) Magnetron sputtering on characteristics of organic thin-film transistors
Composition influence of SiNx gate insulator fabricated by radio frequency (RF) Magnetron sputtering on characteristics of organic thin-film transistors
Yuan, G. C. (author) / Xu, Z. (author) / Zhao, S. L. (author) / Zhang, F. J. (author) / Jia, X. Y. (author) / Xu, N. (author) / Sun, Q. J. (author) / Xu, X. R. (author)
APPLIED SURFACE SCIENCE ; 255 ; 5995-5998
2009-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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