Preparation of SiNx multilayer films by mid-frequency magnetron sputtering for crystalline silicon solar cells: Fid-Bau Portal

Preparation of SiNx multilayer films by mid-frequency magnetron sputtering for crystalline silicon solar cells

Li, J.D. / Shen, G.S. / Chen, W.L. / Li, Z. / Hong, R.J.

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Preparation of SiNx multilayer films by mid-frequency magnetron sputtering for crystalline silicon solar cells

Li, J.D. / Shen, G.S. / Chen, W.L. / Li, Z. / Hong, R.J.

Preparation of SiNx multilayer films by mid-frequency magnetron sputtering for crystalline silicon solar cells

Li, J.D. / Shen, G.S. / Chen, W.L. / Li, Z. / Hong, R.J.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Preparation of SiNx multilayer films by mid-frequency magnetron sputtering for crystalline silicon solar cells

Contributors:

Li, J.D. (author) / Shen, G.S. (author) / Chen, W.L. (author) / Li, Z. (author) / Hong, R.J. (author)

Published in:

Materials science in semiconductor processing ; 59 ; 40-44

Publication date:

2017-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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