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Crystallization of hydrogenated amorphous silicon carbon films with laser and thermal annealing
Crystallization of hydrogenated amorphous silicon carbon films with laser and thermal annealing
Crystallization of hydrogenated amorphous silicon carbon films with laser and thermal annealing
Basa, D. K. (author) / Ambrosone, G. (author) / Coscia, U. (author) / Setaro, A. (author)
APPLIED SURFACE SCIENCE ; 255 ; 5528-5531
2009-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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