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    Laser annealing study of PECVD deposited hydrogenated amorphous silicon carbon alloy films

    New search for: Coscia, U.
    New search for: Ambrosone, G.
    New search for: Gesuele, F.
    New search for: Grossi, V.
    New search for: Parisi, V.
    New search for: Schutzmann, S.
    New search for: Basa, D. K.

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    Laser annealing study of PECVD deposited hydrogenated amorphous silicon carbon alloy films

    New search for: Coscia, U.
    New search for: Ambrosone, G.
    New search for: Gesuele, F.
    New search for: Grossi, V.
    New search for: Parisi, V.
    New search for: Schutzmann, S.
    New search for: Basa, D. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Laser annealing study of PECVD deposited hydrogenated amorphous silicon carbon alloy films

    New search for: Coscia, U.
    New search for: Ambrosone, G.
    New search for: Gesuele, F.
    New search for: Grossi, V.
    New search for: Parisi, V.
    New search for: Schutzmann, S.
    New search for: Basa, D. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Laser annealing study of PECVD deposited hydrogenated amorphous silicon carbon alloy films

    Contributors:

    Coscia, U. (author) / Ambrosone, G. (author) / Gesuele, F. (author) / Grossi, V. (author) / Parisi, V. (author) / Schutzmann, S. (author) / Basa, D. K. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 254 ; 984-988

    Publication date:

    2007-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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