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    Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation (PIII)

    New search for: Vervisch, V.
    New search for: Larmande, Y.
    New search for: Delaporte, P.
    New search for: Sarnet, T.
    New search for: Sentis, M.
    New search for: Etienne, H.
    New search for: Torregrosa, F.
    New search for: Cristiano, F.
    New search for: Fazzini, P. F.

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    Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation (PIII)

    New search for: Vervisch, V.
    New search for: Larmande, Y.
    New search for: Delaporte, P.
    New search for: Sarnet, T.
    New search for: Sentis, M.
    New search for: Etienne, H.
    New search for: Torregrosa, F.
    New search for: Cristiano, F.
    New search for: Fazzini, P. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation (PIII)

    New search for: Vervisch, V.
    New search for: Larmande, Y.
    New search for: Delaporte, P.
    New search for: Sarnet, T.
    New search for: Sentis, M.
    New search for: Etienne, H.
    New search for: Torregrosa, F.
    New search for: Cristiano, F.
    New search for: Fazzini, P. F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation (PIII)

    Contributors:

    Vervisch, V. (author) / Larmande, Y. (author) / Delaporte, P. (author) / Sarnet, T. (author) / Sentis, M. (author) / Etienne, H. (author) / Torregrosa, F. (author) / Cristiano, F. (author) / Fazzini, P. F. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 255 ; 5647-5650

    Publication date:

    2009-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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